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Modified surface testing method for large convex aspheric surfaces based on diffraction optics
Zhang, H. D.; X. K. Wang; D. L. Xue and X. J. Zhang
2017
发表期刊Applied Optics
卷号56期号:34
摘要Large convex aspheric optical elements have been widely applied in advanced optical systems, which have presented a challenging metrology problem. Conventional testing methods cannot satisfy the demand gradually with the change of definition of "large." A modified method is proposed in this paper, which utilizes a relatively small computer-generated hologram and an illumination lens with certain feasibility to measure the large convex aspherics. Two example systems are designed to demonstrate the applicability, and also, the sensitivity of this configuration is analyzed, which proves the accuracy of the configuration can be better than 6 nm with careful alignment and calibration of the illumination lens in advance. Design examples and analysis show that this configuration is applicable to measure the large convex aspheric surfaces. (C) 2017 Optical Society of America
收录类别sci ; ei
语种英语
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/59423
专题中科院长春光机所知识产出
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Zhang, H. D.,X. K. Wang,D. L. Xue and X. J. Zhang. Modified surface testing method for large convex aspheric surfaces based on diffraction optics[J]. Applied Optics,2017,56(34).
APA Zhang, H. D.,X. K. Wang,&D. L. Xue and X. J. Zhang.(2017).Modified surface testing method for large convex aspheric surfaces based on diffraction optics.Applied Optics,56(34).
MLA Zhang, H. D.,et al."Modified surface testing method for large convex aspheric surfaces based on diffraction optics".Applied Optics 56.34(2017).
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