Changchun Institute of Optics,Fine Mechanics and Physics,CAS
| Meter-scale thin film coating equipment based on meniscus-coating technology | |
| Xu, J.; W.-B. Xu; H.-Y. Bu; Z.-W. Lu; Z.-K. Liu; Y.-L. Hong and W.-X. Yu | |
| 2017 | |
| 发表期刊 | Guangxue Jingmi Gongcheng/Optics and Precision Engineering
 |
| 卷号 | 25期号:1 |
| 摘要 | The meniscus chemical coating technology becomes a very promising new chemical thin-film coating technology after traditional coating technologies such as spin-coating and spray coating due to its merits of large area, low-cost and high efficiency. To meet the requirements of one national major projects on the meter-scale chemical thin film coating of optical component surface, based on the systematical research of the meniscus chemical film coating principal, static and dynamic gluing experiments were respectively conducted, and the relationships among the gluing pressure, the gap between substrate and slit, the material hydrophobicity and the morphology of meniscus were analyzed, then the fine tuning of the meniscus could be achieved and equipment based on the meniscus chemical thin film coating technology was developed. The coating uniformity of photo-resist was realized using this equipment on the glass substrate sizing 1400 mm420 mm, making overall coating thickness error less than 4% and satisfying coating requirements of meter-scale chemical precision thin film coating of optical component surface. 2017, Science Press. All right reserved. |
| 收录类别 | ei |
| 语种 | 中文 |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://ir.ciomp.ac.cn/handle/181722/59349 |
| 专题 | 中科院长春光机所知识产出 |
| 推荐引用方式 GB/T 7714 | Xu, J.,W.-B. Xu,H.-Y. Bu,et al. Meter-scale thin film coating equipment based on meniscus-coating technology[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2017,25(1). |
| APA | Xu, J.,W.-B. Xu,H.-Y. Bu,Z.-W. Lu,Z.-K. Liu,&Y.-L. Hong and W.-X. Yu.(2017).Meter-scale thin film coating equipment based on meniscus-coating technology.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,25(1). |
| MLA | Xu, J.,et al."Meter-scale thin film coating equipment based on meniscus-coating technology".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 25.1(2017). |
| 条目包含的文件 | ||||||
| 文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
| Meter scale thin fil（611KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | 浏览 请求全文 | |
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。
修改评论