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Meter-scale thin film coating equipment based on meniscus-coating technology
Xu, J.; W.-B. Xu; H.-Y. Bu; Z.-W. Lu; Z.-K. Liu; Y.-L. Hong and W.-X. Yu
2017
发表期刊Guangxue Jingmi Gongcheng/Optics and Precision Engineering
卷号25期号:1
摘要The meniscus chemical coating technology becomes a very promising new chemical thin-film coating technology after traditional coating technologies such as spin-coating and spray coating due to its merits of large area, low-cost and high efficiency. To meet the requirements of one national major projects on the meter-scale chemical thin film coating of optical component surface, based on the systematical research of the meniscus chemical film coating principal, static and dynamic gluing experiments were respectively conducted, and the relationships among the gluing pressure, the gap between substrate and slit, the material hydrophobicity and the morphology of meniscus were analyzed, then the fine tuning of the meniscus could be achieved and equipment based on the meniscus chemical thin film coating technology was developed. The coating uniformity of photo-resist was realized using this equipment on the glass substrate sizing 1400 mm420 mm, making overall coating thickness error less than 4% and satisfying coating requirements of meter-scale chemical precision thin film coating of optical component surface. 2017, Science Press. All right reserved.
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语种中文
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/59349
专题中科院长春光机所知识产出
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Xu, J.,W.-B. Xu,H.-Y. Bu,et al. Meter-scale thin film coating equipment based on meniscus-coating technology[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2017,25(1).
APA Xu, J.,W.-B. Xu,H.-Y. Bu,Z.-W. Lu,Z.-K. Liu,&Y.-L. Hong and W.-X. Yu.(2017).Meter-scale thin film coating equipment based on meniscus-coating technology.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,25(1).
MLA Xu, J.,et al."Meter-scale thin film coating equipment based on meniscus-coating technology".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 25.1(2017).
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