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Swing arm profilometer: high accuracy testing for large reaction-bonded silicon carbide optics with a capacitive probe
Xiong, L.; X. Luo; H. X. Hu; Z. Y. Zhang; F. Zhang; L. G. Zheng and X. J. Zhang
2017
发表期刊Optical Engineering
卷号56期号:8
摘要A feasible way to improve the manufacturing efficiency of large reaction-bonded silicon carbide optics is to increase the processing accuracy in the ground stage before polishing, which requires high accuracy metrology. A swing arm profilometer (SAP) has been used to measure large optics during the ground stage. A method has been developed for improving the measurement accuracy of SAP using a capacitive probe and implementing calibrations. The experimental result compared with the interferometer test shows the accuracy of 0.068 mu m in root-mean-square (RMS) and maps in 37 low-order Zernike terms show accuracy of 0.048 mu m RMS, which shows a powerful capability to provide a major input in high-precision grinding. (C) The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License.
收录类别sci ; ei
语种英语
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/59342
专题中科院长春光机所知识产出
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Xiong, L.,X. Luo,H. X. Hu,et al. Swing arm profilometer: high accuracy testing for large reaction-bonded silicon carbide optics with a capacitive probe[J]. Optical Engineering,2017,56(8).
APA Xiong, L.,X. Luo,H. X. Hu,Z. Y. Zhang,F. Zhang,&L. G. Zheng and X. J. Zhang.(2017).Swing arm profilometer: high accuracy testing for large reaction-bonded silicon carbide optics with a capacitive probe.Optical Engineering,56(8).
MLA Xiong, L.,et al."Swing arm profilometer: high accuracy testing for large reaction-bonded silicon carbide optics with a capacitive probe".Optical Engineering 56.8(2017).
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