Changchun Institute of Optics,Fine Mechanics and Physics,CAS
| Swing arm profilometer: high accuracy testing for large reaction-bonded silicon carbide optics with a capacitive probe | |
| Xiong, L.; X. Luo; H. X. Hu; Z. Y. Zhang; F. Zhang; L. G. Zheng and X. J. Zhang | |
| 2017 | |
| 发表期刊 | Optical Engineering
 |
| 卷号 | 56期号:8 |
| 摘要 | A feasible way to improve the manufacturing efficiency of large reaction-bonded silicon carbide optics is to increase the processing accuracy in the ground stage before polishing, which requires high accuracy metrology. A swing arm profilometer (SAP) has been used to measure large optics during the ground stage. A method has been developed for improving the measurement accuracy of SAP using a capacitive probe and implementing calibrations. The experimental result compared with the interferometer test shows the accuracy of 0.068 mu m in root-mean-square (RMS) and maps in 37 low-order Zernike terms show accuracy of 0.048 mu m RMS, which shows a powerful capability to provide a major input in high-precision grinding. (C) The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. |
| 收录类别 | sci ; ei |
| 语种 | 英语 |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://ir.ciomp.ac.cn/handle/181722/59342 |
| 专题 | 中科院长春光机所知识产出 |
| 推荐引用方式 GB/T 7714 | Xiong, L.,X. Luo,H. X. Hu,et al. Swing arm profilometer: high accuracy testing for large reaction-bonded silicon carbide optics with a capacitive probe[J]. Optical Engineering,2017,56(8). |
| APA | Xiong, L.,X. Luo,H. X. Hu,Z. Y. Zhang,F. Zhang,&L. G. Zheng and X. J. Zhang.(2017).Swing arm profilometer: high accuracy testing for large reaction-bonded silicon carbide optics with a capacitive probe.Optical Engineering,56(8). |
| MLA | Xiong, L.,et al."Swing arm profilometer: high accuracy testing for large reaction-bonded silicon carbide optics with a capacitive probe".Optical Engineering 56.8(2017). |
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| Swing arm profilomet（3513KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | 浏览 下载 | |
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