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Dual-drive long-travel precise positioning stage of grating ruling engine
Wang, J. S.; Bayanheshig and C. A. Zhu
2017
Source PublicationInternational Journal of Advanced Manufacturing Technology
Volume93Issue:9
AbstractThe presented dual-drive long-travel precise positioning stage is employed in grating ruling engine and capable of extended travel and high precision. Based on the characteristic of grating ruling engine, a dual-drive positioning system is developed. The primary positioning stage is an open-loop system and designed to obtain long-travel range. The secondary positioning stage with a control system can guarantee the positioning precision being less than 10 nm. After modeling the fine positioning system, a single-neuron-based PID controller is employed to implement the control system. The experiment results demonstrate that in the long-travel mode, the stage is capable of performing positioning with an extended move range and accuracy being less than 10 nm. Meanwhile, in the short-travel mode, the stage performs positioning with a limited range of 120 mu m and accuracy being less than 7 nm. The main sources of the positioning deviation including clearance, vibration, and the measurement error are analyzed in detail.
Indexed Bysci ; ei
Language英语
Document Type期刊论文
Identifierhttp://ir.ciomp.ac.cn/handle/181722/59256
Collection中科院长春光机所知识产出
Recommended Citation
GB/T 7714
Wang, J. S.,Bayanheshig and C. A. Zhu. Dual-drive long-travel precise positioning stage of grating ruling engine[J]. International Journal of Advanced Manufacturing Technology,2017,93(9).
APA Wang, J. S.,&Bayanheshig and C. A. Zhu.(2017).Dual-drive long-travel precise positioning stage of grating ruling engine.International Journal of Advanced Manufacturing Technology,93(9).
MLA Wang, J. S.,et al."Dual-drive long-travel precise positioning stage of grating ruling engine".International Journal of Advanced Manufacturing Technology 93.9(2017).
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