CIOMP OpenIR  > 中科院长春光机所知识产出
Correcting groove error in gratings ruled on a 500-mm ruling engine using interferometric control
Mi, X. T.; H. L. Yu; H. Z. Yu; S. W. Zhang; X. T. Li; X. F. Yao; X. D. Qi; Bayinhedhig and Q. H. Wan
2017
Source PublicationApplied Optics
Volume56Issue:21
AbstractGroove error is one of the most important factors affecting grating quality and spectral performance. To reduce groove error, we propose a new ruling-tool carriage system based on aerostatic guideways. We design a new blank carriage system with double piezoelectric actuators. We also propose a completely closed-loop servo-control system with a new optical measurement system that can control the position of the diamond relative to the blank. To evaluate our proposed methods, we produced several gratings, including an echelle grating with 79 grooves/mm, a grating with 768 grooves/mm, and a high-density grating with 6000 grooves/mm. The results show that our methods effectively reduce groove error in ruled gratings. (C) 2017 Optical Society of America
Indexed Bysci ; ei
Language英语
Document Type期刊论文
Identifierhttp://ir.ciomp.ac.cn/handle/181722/59139
Collection中科院长春光机所知识产出
Recommended Citation
GB/T 7714
Mi, X. T.,H. L. Yu,H. Z. Yu,et al. Correcting groove error in gratings ruled on a 500-mm ruling engine using interferometric control[J]. Applied Optics,2017,56(21).
APA Mi, X. T..,H. L. Yu.,H. Z. Yu.,S. W. Zhang.,X. T. Li.,...&Bayinhedhig and Q. H. Wan.(2017).Correcting groove error in gratings ruled on a 500-mm ruling engine using interferometric control.Applied Optics,56(21).
MLA Mi, X. T.,et al."Correcting groove error in gratings ruled on a 500-mm ruling engine using interferometric control".Applied Optics 56.21(2017).
Files in This Item: Download All
File Name/Size DocType Version Access License
Correcting groove er(2137KB)期刊论文作者接受稿开放获取CC BY-NC-SAView Download
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Mi, X. T.]'s Articles
[H. L. Yu]'s Articles
[H. Z. Yu]'s Articles
Baidu academic
Similar articles in Baidu academic
[Mi, X. T.]'s Articles
[H. L. Yu]'s Articles
[H. Z. Yu]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Mi, X. T.]'s Articles
[H. L. Yu]'s Articles
[H. Z. Yu]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: Correcting groove error.pdf
Format: Adobe PDF
This file does not support browsing at this time
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.