CIOMP OpenIR  > 中科院长春光机所知识产出
Influence and Revising Method of Grating Ruling Engine's Abbe Error on Quality of Grating Wavefront
Mi, X.; H. Yu; H. Yu; X. Qi; X. Li and Q. Wan
2017
Source PublicationZhongguo Jiguang/Chinese Journal of Lasers
Volume44Issue:9
AbstractDiffracted wavefront quality is one of the important performance indexes of gratings. If there is Abbe error in the grating ruling engine, it will directly affect the positioning accuracy of grooves, thus affecting wavefront quality of gratings. The physical models of the Abbe error and the quality of the grating diffraction wave are established, to analyze the influence of the error on the wavefront quality. Aiming at the Abbe error, a kind of measurement optical path is designed based on dual-frequency laser interferometry, and the influence of Abbe error on diffracted wavefront of the grating is measured and simulated. Furthermore, the error control method based on double-layer grating table structure is proposed. Before and after revising Abbe error, the ruling experiments for two echelle gratings with the size of 80 mm100 mm and groove density of 79 groove/mm are carried out. The results show that the diffracted wavefront error of the gratings in-36 blaze order is reduced from 0.529 to 0.159 (=632.8 nm) by the measurement and correction of the Abbe error, which effectively reduces the influence of Abbe error on the quality of grating's diffracted wavefront. 2017, Chinese Lasers Press. All right reserved.
Indexed Byei
Language中文
Document Type期刊论文
Identifierhttp://ir.ciomp.ac.cn/handle/181722/59138
Collection中科院长春光机所知识产出
Recommended Citation
GB/T 7714
Mi, X.,H. Yu,H. Yu,et al. Influence and Revising Method of Grating Ruling Engine's Abbe Error on Quality of Grating Wavefront[J]. Zhongguo Jiguang/Chinese Journal of Lasers,2017,44(9).
APA Mi, X.,H. Yu,H. Yu,X. Qi,&X. Li and Q. Wan.(2017).Influence and Revising Method of Grating Ruling Engine's Abbe Error on Quality of Grating Wavefront.Zhongguo Jiguang/Chinese Journal of Lasers,44(9).
MLA Mi, X.,et al."Influence and Revising Method of Grating Ruling Engine's Abbe Error on Quality of Grating Wavefront".Zhongguo Jiguang/Chinese Journal of Lasers 44.9(2017).
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