Piezoelectric Actuated Phase Shifter Based on External Laser Interferometer: Design, Control and Experimental Validation

	Piezoelectric Actuated Phase Shifter Based on External Laser Interferometer: Design, Control and Experimental Validation
	Li, P. Z.; X. D. Wang; Y. X. Sui; D. F. Zhang; D. F. Wang; L. J. Dong and M. Y. Ni
	2017
发表期刊	Sensors
卷号	17 期号:4
摘要	To improve the phase-shifting accuracy, this paper presents a novel integrated framework for design, control and experimental validation of the piezoelectric actuated phase shifter with a trade-off between accuracy and cost. The piezoelectric actuators with built-in sensors are adopted to drive the double parallel four-bar linkage flexure hinge-based mechanisms. Three mechanisms form the tripod structure of the assembled phase shifter. Then, a semi-closed loop controller with inner feedback and outer feedforward loops via the external laser interferometer is developed for accurate positioning of the phase shifter. Finally, experiments related with travel range, step response, linearity and repeatability are carried out. The linearity error is 0.21% and the repeatability error of 10 mu m displacement is 3 nm. The results clearly demonstrate the good performance of the developed phase shifter and the feasibility of the proposed integrated framework.
收录类别	sci ; ei
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/59013
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Li, P. Z.,X. D. Wang,Y. X. Sui,et al. Piezoelectric Actuated Phase Shifter Based on External Laser Interferometer: Design, Control and Experimental Validation[J]. Sensors,2017,17(4).
APA	Li, P. Z.,X. D. Wang,Y. X. Sui,D. F. Zhang,D. F. Wang,&L. J. Dong and M. Y. Ni.(2017).Piezoelectric Actuated Phase Shifter Based on External Laser Interferometer: Design, Control and Experimental Validation.Sensors,17(4).
MLA	Li, P. Z.,et al."Piezoelectric Actuated Phase Shifter Based on External Laser Interferometer: Design, Control and Experimental Validation".Sensors 17.4(2017).

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