Phase analysis in computer-generated hologram induced by direct laser writing systems with orthogonality error

	Phase analysis in computer-generated hologram induced by direct laser writing systems with orthogonality error
	Zheng, L.; T. Hao; C. Guo; R. Wang and Z. Zhang
	2016
发表期刊	Guangxue Xuebao/Acta Optica Sinica
卷号	36 期号:10
摘要	Computer-generated hologram (CGH) plays an important role in testing high-accuracy optical elements such as aspheric and freeform surfaces. However, the orthogonality error induced by the rails of direct laser writing systems will deteriorate the fabrication accuracy of CGH, and thus introduce astigmatism error to the testing results of surface shape. To quantitatively study the influence of orthogonality error induced by the rails of direct laser writing systems on testing results of CGH, a model of rails' angle error of direct laser writing systems using scalar diffraction theory is established, and the impact of orthogonality error on the alignment section of the CGH is analyzed. The experimental results indicate that there is 2.26%, 2.33% and 1.72% deviation in root mean square(RMS), peak valley(PV) and Zernike astigmatic coefficient respectively with theoretical results when orthogonality error is 800 rad, which verifies the correctness of the established error model. 2016, Chinese Lasers Press. All right reserved.
文章类型	期刊
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/57483
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zheng, L.,T. Hao,C. Guo,et al. Phase analysis in computer-generated hologram induced by direct laser writing systems with orthogonality error[J]. Guangxue Xuebao/Acta Optica Sinica,2016,36(10).
APA	Zheng, L.,T. Hao,C. Guo,&R. Wang and Z. Zhang.(2016).Phase analysis in computer-generated hologram induced by direct laser writing systems with orthogonality error.Guangxue Xuebao/Acta Optica Sinica,36(10).
MLA	Zheng, L.,et al."Phase analysis in computer-generated hologram induced by direct laser writing systems with orthogonality error".Guangxue Xuebao/Acta Optica Sinica 36.10(2016).

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