Transparent ultraviolet photovoltaic cells

	Transparent ultraviolet photovoltaic cells
	Yang, X.; C. X. Shan; Y. J. Lu; X. H. Xie; B. H. Li; S. P. Wang; M. M. Jiang and D. Z. Shen
	2016
发表期刊	Optics Letters
卷号	41 期号:4
摘要	To meet the requirement of lithographic tool for the distortion in a lithographic projection lens, the distortion of the optical lithography introduced by alignment errors of a reticle was researched. The Legendre polynomials were used to describe the distortion of lithographic projection lens, and then it was taken to analyze and compensate the distortion. Based on the proposed methods, a lithographic projection lens with a Numerical Aperture (NA) of 0.75 and the working wavelength of 193 nm was analyzed. The analysis results show that the combinational tolerances of the reticle tilt error in 1.0 m and the reticle translation error in 0.1 mrad have aroused by uncalibrated distortions of 2113.2 nm and 10.0 nm. The Legendre polynomial was used to fit the distortion to obtain the coefficients of the Legendre polynomial, and then to get the distortion sensitivity of the reticle alignment errors. The distortion sensitivity then was used to perform the tolerance analysis and compensation for the random position errors of the reticle. As the distortion was expected to be less 2 nm, the requirement of the reticle z-direction tolerance is 2.0 m and those of the reticle x-tilt and y-tilt tolerances are 22.3 mad and 55.3 mad, respectively. The results demonstrate that the way proposed is suitable for analyzing and compensating the distortion introduced by reticle alignment errors in lithographic projection lenses. 2016, Chinese Academy of Sciences. All right reserved.
文章类型	期刊
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/57356
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Yang, X.,C. X. Shan,Y. J. Lu,et al. Transparent ultraviolet photovoltaic cells[J]. Optics Letters,2016,41(4).
APA	Yang, X..,C. X. Shan.,Y. J. Lu.,X. H. Xie.,B. H. Li.,...&M. M. Jiang and D. Z. Shen.(2016).Transparent ultraviolet photovoltaic cells.Optics Letters,41(4).
MLA	Yang, X.,et al."Transparent ultraviolet photovoltaic cells".Optics Letters 41.4(2016).

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