CIOMP OpenIR  > 中科院长春光机所知识产出
Transparent ultraviolet photovoltaic cells
Yang, X.; C. X. Shan; Y. J. Lu; X. H. Xie; B. H. Li; S. P. Wang; M. M. Jiang and D. Z. Shen
2016
发表期刊Optics Letters
卷号41期号:4
摘要To meet the requirement of lithographic tool for the distortion in a lithographic projection lens, the distortion of the optical lithography introduced by alignment errors of a reticle was researched. The Legendre polynomials were used to describe the distortion of lithographic projection lens, and then it was taken to analyze and compensate the distortion. Based on the proposed methods, a lithographic projection lens with a Numerical Aperture (NA) of 0.75 and the working wavelength of 193 nm was analyzed. The analysis results show that the combinational tolerances of the reticle tilt error in 1.0 m and the reticle translation error in 0.1 mrad have aroused by uncalibrated distortions of 2113.2 nm and 10.0 nm. The Legendre polynomial was used to fit the distortion to obtain the coefficients of the Legendre polynomial, and then to get the distortion sensitivity of the reticle alignment errors. The distortion sensitivity then was used to perform the tolerance analysis and compensation for the random position errors of the reticle. As the distortion was expected to be less 2 nm, the requirement of the reticle z-direction tolerance is 2.0 m and those of the reticle x-tilt and y-tilt tolerances are 22.3 mad and 55.3 mad, respectively. The results demonstrate that the way proposed is suitable for analyzing and compensating the distortion introduced by reticle alignment errors in lithographic projection lenses. 2016, Chinese Academy of Sciences. All right reserved.
文章类型期刊
收录类别SCI ; EI
语种英语
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/57356
专题中科院长春光机所知识产出
推荐引用方式
GB/T 7714
Yang, X.,C. X. Shan,Y. J. Lu,et al. Transparent ultraviolet photovoltaic cells[J]. Optics Letters,2016,41(4).
APA Yang, X..,C. X. Shan.,Y. J. Lu.,X. H. Xie.,B. H. Li.,...&M. M. Jiang and D. Z. Shen.(2016).Transparent ultraviolet photovoltaic cells.Optics Letters,41(4).
MLA Yang, X.,et al."Transparent ultraviolet photovoltaic cells".Optics Letters 41.4(2016).
条目包含的文件 下载所有文件
文件名称/大小 文献类型 版本类型 开放类型 使用许可
Transparent ultravio(1713KB)期刊论文作者接受稿开放获取CC BY-NC-SA浏览 下载
个性服务
推荐该条目
保存到收藏夹
查看访问统计
导出为Endnote文件
谷歌学术
谷歌学术中相似的文章
[Yang, X.]的文章
[C. X. Shan]的文章
[Y. J. Lu]的文章
百度学术
百度学术中相似的文章
[Yang, X.]的文章
[C. X. Shan]的文章
[Y. J. Lu]的文章
必应学术
必应学术中相似的文章
[Yang, X.]的文章
[C. X. Shan]的文章
[Y. J. Lu]的文章
相关权益政策
暂无数据
收藏/分享
文件名: Transparent ultraviolet photovoltaic cells.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。