Optical design of high-numerical aperture lithographic lenses

	Optical design of high-numerical aperture lithographic lenses
	Xu, M.-F.; W.-B. Pang; X.-R. Xu; X.-H. Wang and W. Huang
	2016
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
卷号	24 期号:4
摘要	Quantum cascade lasers (QCLs) are normally based on one-dimensional confined quantum wells. In this scheme, it is still a challenge to produce lasing with a frequency higher than mid-infrared. Here, we discuss the possibility to extend the spectral range of QCLs to the higher frequency region by adding another dimensional confinement. Taking the ZnO/MgO system as an example, we demonstrate theoretically that such a two-dimensional confined QCL can operate at wavelengths from the near-infrared lambda = 2.95 mu m, 1.57 mu m, 1.13 mu m to the visible 734 nm.
文章类型	期刊
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/57317
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Xu, M.-F.,W.-B. Pang,X.-R. Xu,et al. Optical design of high-numerical aperture lithographic lenses[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2016,24(4).
APA	Xu, M.-F.,W.-B. Pang,X.-R. Xu,&X.-H. Wang and W. Huang.(2016).Optical design of high-numerical aperture lithographic lenses.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,24(4).
MLA	Xu, M.-F.,et al."Optical design of high-numerical aperture lithographic lenses".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 24.4(2016).

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