Beam homogenized shaping and speckle suppression in laser projection display system using liquid crystal on silicon

	Beam homogenized shaping and speckle suppression in laser projection display system using liquid crystal on silicon
	Liang, C.; W. Zhang; D. Rui; Y. Sui and H. Yang
	2016
发表期刊	Zhongguo Jiguang/Chinese Journal of Lasers
卷号	43 期号:12
摘要	As we know, high-quality large-area thick Al films have important applications in echelle gratings. To fabricate them, the deposition angle is one of the most decisive factors. In this study, for the first time we investigate the structural properties of thick Al films deposited by electron beam evaporation at different deposition angles. By measuring film morphology, surface roughness and hardness, we demonstrate the influences of deposition angle on structural properties of thick Al films. A large amount of columnar microstructures and air voids appear in thick Al films with deposition angle increasing, which seriously degrade surface roughness and film hardness. The formation origin of columnar microstructures and air voids is clarified through growth dynamics analysis of Al films. The large deposition angle could significantly reduce the structural properties of Al films. So to attain thick Al films with large-area uniformity and high quality, the deposition angle should be precisely controlled.
文章类型	期刊
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/57054
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Liang, C.,W. Zhang,D. Rui,et al. Beam homogenized shaping and speckle suppression in laser projection display system using liquid crystal on silicon[J]. Zhongguo Jiguang/Chinese Journal of Lasers,2016,43(12).
APA	Liang, C.,W. Zhang,D. Rui,&Y. Sui and H. Yang.(2016).Beam homogenized shaping and speckle suppression in laser projection display system using liquid crystal on silicon.Zhongguo Jiguang/Chinese Journal of Lasers,43(12).
MLA	Liang, C.,et al."Beam homogenized shaping and speckle suppression in laser projection display system using liquid crystal on silicon".Zhongguo Jiguang/Chinese Journal of Lasers 43.12(2016).

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