Improvement of radiation measurement precision for target by using atmosphere-corrected coefficients

	Improvement of radiation measurement precision for target by using atmosphere-corrected coefficients
	Guo, L.-H.; H.-Z. Guo; C.-Y. Yang and N. Li
	2016
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
卷号	24 期号:8
摘要	Adjusting mechanisms with micrometer stroke, nanometer accuracy, high load capacity and compact structure are needed in the deep ultraviolet lithography objective lens. We propose a monolithic adjusting mechanism based on 6-PSS (prismatic-spherical-spherical) parallel mechanism to advisably meet these requirements. Six prismatic joints of the 6-PSS parallel mechanism are optimized into three, which improves the reliability and reduces the cost of the adjusting mechanism. To realize monolithic configuration, a thinned fillet flexure hinge is proposed to work as the spherical joint of the 6-PSS parallel mechanism. This simplifies the alignment process and improves the mechanical accuracy. Structure analysis including positional relationship and transmission ratio is carried out to provide a basis for determining the primary structural dimension of the adjusting mechanism. Verification test results show that the numerical result of the transmission ratio agrees with the experimental one. The axial stroke of the adjusting mechanism is 74.4 mu m, the accuracy is within 40 nm, and the surface figure variation of the optical element during the adjusting process is less than 1.5%, which satisfies the operation requirement of the lithography objective lens and shows a bright prospect to actuate other objects in the applications of micro-nano. (C) 2016 Elsevier B.V. All rights reserved.
文章类型	期刊
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56943
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Guo, L.-H.,H.-Z. Guo,C.-Y. Yang and N. Li. Improvement of radiation measurement precision for target by using atmosphere-corrected coefficients[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2016,24(8).
APA	Guo, L.-H.,H.-Z. Guo,&C.-Y. Yang and N. Li.(2016).Improvement of radiation measurement precision for target by using atmosphere-corrected coefficients.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,24(8).
MLA	Guo, L.-H.,et al."Improvement of radiation measurement precision for target by using atmosphere-corrected coefficients".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 24.8(2016).

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