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Ion-bombardment-induced reduction in vacancies and its enhanced effect on conductivity and reflectivity in hafnium nitride films
Gu, Z. Q.; J. F. Wang; C. Q. Hu; X. B. Zhang; J. C. Dang; S. Zhang; J. Gao; X. Y. Wang; H. Chen and W. T. Zheng
2016
发表期刊Applied Physics a-Materials Science & Processing
卷号122期号:8
摘要It is found that incorporation of tantalum in a hafnium nitride film induces a tunable optical reflectivity and improves the hardness. The underlying mechanism can be illustrated by a combination of experiments and first-principles calculations. It is shown that the evolution of optical reflectivity and the increase in hardness arise from the formation of Hf1-xTaxN solid solutions and the resulting changes in the electronic structure. The increase in infrared reflectance originates from the increase in concentration of free electrons (n) because Ta (d(3)s(2)) has one more valence electron than Hf (d(2)s(2)). The sharp blue-shift in cutoff wavelength is attributed to the increase in n and the appearance of t(2g) -> e(g) interband absorption. These results suggest that alloying of a second transition metal renders an effective avenue to improve simultaneously the optical and mechanical properties of transition metal nitride films. This opens up a door in preparing high-reflectance yet hard films. Published by AIP Publishing.
文章类型期刊
收录类别SCI ; EI
语种英语
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/56933
专题中科院长春光机所知识产出
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Gu, Z. Q.,J. F. Wang,C. Q. Hu,et al. Ion-bombardment-induced reduction in vacancies and its enhanced effect on conductivity and reflectivity in hafnium nitride films[J]. Applied Physics a-Materials Science & Processing,2016,122(8).
APA Gu, Z. Q..,J. F. Wang.,C. Q. Hu.,X. B. Zhang.,J. C. Dang.,...&H. Chen and W. T. Zheng.(2016).Ion-bombardment-induced reduction in vacancies and its enhanced effect on conductivity and reflectivity in hafnium nitride films.Applied Physics a-Materials Science & Processing,122(8).
MLA Gu, Z. Q.,et al."Ion-bombardment-induced reduction in vacancies and its enhanced effect on conductivity and reflectivity in hafnium nitride films".Applied Physics a-Materials Science & Processing 122.8(2016).
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