Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Test of optical mirror surface using fringe reflection system | |
Yuan, T.; F. Zhang; X.-P. Tao; R. Zhou and J.-J. Fu | |
2015 | |
发表期刊 | Guangzi Xuebao/Acta Photonica Sinica |
卷号 | 44期号:9 |
摘要 | Large shape errors can be found from the stage of fine grinding to the beginning of polish, it is proved that it can't satisfy the measuring requirements to test the mirrors with profilers or ordinary interferometer in that stage. To obtain the optical mirrors' shape error based on fringe reflection, the method of high precision and large dynamic is proposed. The principle and system errors of the testing system were analyzed. To verify the feasible of the testing system, the model of testing on a reflecting mirror (the aperture is 100 mm) was built and simulated by ray tracing. The preliminary testing data on rotational symmetry spherical mirror is: PV is 0.523 m, RMS is 0.086 m, The feasibility of the testing system based on fringe reflection used in this period is verified. , 2015, Chinese Optical Society. All right reserved. |
文章类型 | 期刊论文 |
收录类别 | EI |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/56243 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Yuan, T.,F. Zhang,X.-P. Tao,et al. Test of optical mirror surface using fringe reflection system[J]. Guangzi Xuebao/Acta Photonica Sinica,2015,44(9). |
APA | Yuan, T.,F. Zhang,X.-P. Tao,&R. Zhou and J.-J. Fu.(2015).Test of optical mirror surface using fringe reflection system.Guangzi Xuebao/Acta Photonica Sinica,44(9). |
MLA | Yuan, T.,et al."Test of optical mirror surface using fringe reflection system".Guangzi Xuebao/Acta Photonica Sinica 44.9(2015). |
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文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
条纹反射法检测光学反射镜面形.caj(1186KB) | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | 浏览 下载 |
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