Test of optical mirror surface using fringe reflection system

	Test of optical mirror surface using fringe reflection system
	Yuan, T.; F. Zhang; X.-P. Tao; R. Zhou and J.-J. Fu
	2015
发表期刊	Guangzi Xuebao/Acta Photonica Sinica
卷号	44 期号:9
摘要	Large shape errors can be found from the stage of fine grinding to the beginning of polish, it is proved that it can't satisfy the measuring requirements to test the mirrors with profilers or ordinary interferometer in that stage. To obtain the optical mirrors' shape error based on fringe reflection, the method of high precision and large dynamic is proposed. The principle and system errors of the testing system were analyzed. To verify the feasible of the testing system, the model of testing on a reflecting mirror (the aperture is 100 mm) was built and simulated by ray tracing. The preliminary testing data on rotational symmetry spherical mirror is: PV is 0.523 m, RMS is 0.086 m, The feasibility of the testing system based on fringe reflection used in this period is verified. , 2015, Chinese Optical Society. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56243
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Yuan, T.,F. Zhang,X.-P. Tao,et al. Test of optical mirror surface using fringe reflection system[J]. Guangzi Xuebao/Acta Photonica Sinica,2015,44(9).
APA	Yuan, T.,F. Zhang,X.-P. Tao,&R. Zhou and J.-J. Fu.(2015).Test of optical mirror surface using fringe reflection system.Guangzi Xuebao/Acta Photonica Sinica,44(9).
MLA	Yuan, T.,et al."Test of optical mirror surface using fringe reflection system".Guangzi Xuebao/Acta Photonica Sinica 44.9(2015).

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