Changchun Institute of Optics,Fine Mechanics and Physics,CAS
| An accurate method for measuring interference fringe period in scanning beam interference lithography system | |
| Jiang, S.; Bayanheshig; M. Pan; W. Li and Y. Song | |
| 2015 | |
| 发表期刊 | Guangxue Xuebao/Acta Optica Sinica
 |
| 卷号 | 35期号:7 |
| 摘要 | Interference fringe period is a very important parameter of phase locking in scanning beam interference lithography system (SBIL). According to the feature of the SBIL system, a method that period is measured by moving beam-splitter is proposed. Based on Gaussian beam propagation theory, theoretical error is analyzed. Period counting method is proposed to calculate fringe period. In order to make it easy for two-dimension stage design, measuring period by short-stroke linear stage's assistance is put forward and experiments are done. The results show that: the method that measuring period by short-stroke linear stage's assistance is feasible in principle. When fringe density is 1800 line/mm in SBIL system, period measurement repeatability is 1.0810sup-5/sup (1). Data measured in exposure experiments is consistent with the model, then the feasibility of this method is verified. , 2015, Chinese Optical Society. All right reserved. |
| 文章类型 | 期刊论文 |
| 收录类别 | EI |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://ir.ciomp.ac.cn/handle/181722/56166 |
| 专题 | 中科院长春光机所知识产出 |
| 推荐引用方式 GB/T 7714 | Jiang, S.,Bayanheshig,M. Pan,et al. An accurate method for measuring interference fringe period in scanning beam interference lithography system[J]. Guangxue Xuebao/Acta Optica Sinica,2015,35(7). |
| APA | Jiang, S.,Bayanheshig,M. Pan,&W. Li and Y. Song.(2015).An accurate method for measuring interference fringe period in scanning beam interference lithography system.Guangxue Xuebao/Acta Optica Sinica,35(7). |
| MLA | Jiang, S.,et al."An accurate method for measuring interference fringe period in scanning beam interference lithography system".Guangxue Xuebao/Acta Optica Sinica 35.7(2015). |
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