Manufacture of Silicon Modification Layer on Silicon Carbide Surface by Magnetorheological Finishing

	Manufacture of Silicon Modification Layer on Silicon Carbide Surface by Magnetorheological Finishing
	Bai, Y.; F. Zhang; L. Li; L. Zheng and X. Zhang
	2015
发表期刊	Guangxue Xuebao/Acta Optica Sinica
卷号	35 期号:3
摘要	Magnetorheological finishing (MRF) process is adopted to overcome the drawback of traditional polishing method in final finishing of SiC after silicon modified and removing the debris of optical surface in final finishing with high efficiency and fast convergence. The requirements of magnetorheological (MR) polishing fluid are proposed according to the actual polishing situation. The rheological characteristic and dispersion stability are tested, which verify that the prepared MR polishing fluid possesses good performance. A silicon modified reactbonded coaxial asphere mirror with diameter of 130 mm (effective sub-aperture is 120 mm) is polished with two iteration in three hours approximately. The root-mean-square (RMS) of the surface accuracy is improved from 0.051 (=632.8 nm) to 0.012 rapidly and the surface roughness Ra reaches 0.618 nm. The results proves that the prepared MR polishing fluid can satisfy the polishing requirement of modification layer on silicon carbide and MRF possesses outstanding advantages in final finishing of silicon modified mirror. , 2015, Chinese Optical Society. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56156
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Bai, Y.,F. Zhang,L. Li,et al. Manufacture of Silicon Modification Layer on Silicon Carbide Surface by Magnetorheological Finishing[J]. Guangxue Xuebao/Acta Optica Sinica,2015,35(3).
APA	Bai, Y.,F. Zhang,L. Li,&L. Zheng and X. Zhang.(2015).Manufacture of Silicon Modification Layer on Silicon Carbide Surface by Magnetorheological Finishing.Guangxue Xuebao/Acta Optica Sinica,35(3).
MLA	Bai, Y.,et al."Manufacture of Silicon Modification Layer on Silicon Carbide Surface by Magnetorheological Finishing".Guangxue Xuebao/Acta Optica Sinica 35.3(2015).

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