Thermal aberration in precision optical system

	Thermal aberration in precision optical system
	Zhang, W.; X.-F. Yu; L.-S. Zhou; X.-L. Wang; M.-Y. Ni and H.-F. Peng
	2015
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
卷号	23 期号:11 页码:3033-3040
摘要	To control and compensate the thermal aberration of objective lens accurately, a special three lens integrated experiment optical system was designed, and the calculation method for the thermal aberration was verified based on the designed system. Firstly, thermal aberration simulation method and corresponding verified experiment were introduced. Then, a series of experiments were carried out in different thermal load conditions and comparison of experimental and simulated results were also presented. Finally, combining experimental and simulated results, asymmetric aberrations and focus drift trends of the optical system under a certain thermal load were analyzed, and transient properties of thermal aberration were obtained. The results show that the ratios of RMS(Root Mean Square) values of thermal aberration from the experiments and simulations are 1:3.75:9.00 and 1:4.01:9.01 when the thermal load ratio of the optical system is 1:4:9. The data suggests that the thermal aberration is proportional to a heat load it suffers. For transient thermal aberration, simulation results show that stable time of the best focus position is less than 450 min whereas the stable time of Z4and Z11are 48 min and 9 min respectively. The stable time of best focus is much longer than that of asymmetrical aberration. Thermal aberration properties obtained through the three lens integrated optical system provide references for thermal aberration reduction and calibration strategies both for lithography objective lenses and other similar optical systems. 2015, SCIENCE PRESS. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56141
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhang, W.,X.-F. Yu,L.-S. Zhou,et al. Thermal aberration in precision optical system[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2015,23(11):3033-3040.
APA	Zhang, W.,X.-F. Yu,L.-S. Zhou,X.-L. Wang,&M.-Y. Ni and H.-F. Peng.(2015).Thermal aberration in precision optical system.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,23(11),3033-3040.
MLA	Zhang, W.,et al."Thermal aberration in precision optical system".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 23.11(2015):3033-3040.

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