Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Analysis and improvement of rod structures for large diffraction grating ruling engines | |
Mi, X.-T.; H.-Z. Yu; H.-L. Yu; X.-F. Yao; N. Song; S.-L. Feng and X.-D. Qi | |
2015 | |
发表期刊 | Guangxue Jingmi Gongcheng/Optics and Precision Engineering |
卷号 | 23期号:3页码:745-752 |
摘要 | As the double-rod structure in ruling system of a large diffraction grating ruling machine can not meet its accuracy requirement, this paper designs a single-rod structure to substitute it. The reasons of bending error of indexing direction of quarts guide rail in the grating ruling machine were discussed and the method to reduce the error was analyzed. Meanwhile the rod structure and the stress on a saddle slider were analyzed. Then, based on the theory of bending deformation of material mechanics, the model of bending error in indexing direction of quartz guide rail was established. On the basis of this model, the bending errors of quartz guide rails on the double-rod structure and the single-rod structure were simulated. Finally, a frequency laser interferometer was used to measure the two feature points on quartz guide rail. Experimental results indicate that the bendings at the measuring points of quartz guide rail are reduced from 50.36 nm to less than 10 nm by using the single-rod structure. It concludes that the single-rod structure basically meets the requirement of large diffraction grating ruling engine for the measuring precision of 5-10 nm. , 2015, Chinese Academy of Sciences. All right reserved. |
文章类型 | 期刊论文 |
收录类别 | EI |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/56076 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Mi, X.-T.,H.-Z. Yu,H.-L. Yu,et al. Analysis and improvement of rod structures for large diffraction grating ruling engines[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2015,23(3):745-752. |
APA | Mi, X.-T.,H.-Z. Yu,H.-L. Yu,X.-F. Yao,N. Song,&S.-L. Feng and X.-D. Qi.(2015).Analysis and improvement of rod structures for large diffraction grating ruling engines.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,23(3),745-752. |
MLA | Mi, X.-T.,et al."Analysis and improvement of rod structures for large diffraction grating ruling engines".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 23.3(2015):745-752. |
条目包含的文件 | 下载所有文件 | |||||
文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
大型衍射光栅刻划机拉杆结构的分析与改进.(388KB) | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | 浏览 下载 |
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。
修改评论