Analysis and improvement of rod structures for large diffraction grating ruling engines

	Analysis and improvement of rod structures for large diffraction grating ruling engines
	Mi, X.-T.; H.-Z. Yu; H.-L. Yu; X.-F. Yao; N. Song; S.-L. Feng and X.-D. Qi
	2015
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
卷号	23 期号:3 页码:745-752
摘要	As the double-rod structure in ruling system of a large diffraction grating ruling machine can not meet its accuracy requirement, this paper designs a single-rod structure to substitute it. The reasons of bending error of indexing direction of quarts guide rail in the grating ruling machine were discussed and the method to reduce the error was analyzed. Meanwhile the rod structure and the stress on a saddle slider were analyzed. Then, based on the theory of bending deformation of material mechanics, the model of bending error in indexing direction of quartz guide rail was established. On the basis of this model, the bending errors of quartz guide rails on the double-rod structure and the single-rod structure were simulated. Finally, a frequency laser interferometer was used to measure the two feature points on quartz guide rail. Experimental results indicate that the bendings at the measuring points of quartz guide rail are reduced from 50.36 nm to less than 10 nm by using the single-rod structure. It concludes that the single-rod structure basically meets the requirement of large diffraction grating ruling engine for the measuring precision of 5-10 nm. , 2015, Chinese Academy of Sciences. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56076
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Mi, X.-T.,H.-Z. Yu,H.-L. Yu,et al. Analysis and improvement of rod structures for large diffraction grating ruling engines[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2015,23(3):745-752.
APA	Mi, X.-T.,H.-Z. Yu,H.-L. Yu,X.-F. Yao,N. Song,&S.-L. Feng and X.-D. Qi.(2015).Analysis and improvement of rod structures for large diffraction grating ruling engines.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,23(3),745-752.
MLA	Mi, X.-T.,et al."Analysis and improvement of rod structures for large diffraction grating ruling engines".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 23.3(2015):745-752.

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