Plane holographic varied-line-space grating for DCLS in EUV region

	Plane holographic varied-line-space grating for DCLS in EUV region
	Jiang, Y.-X.; Bayanheshig; X.-L. Zhao; S. Yang and N. Wu
	2015
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
卷号	23 期号:8 页码:2117-2124
摘要	According to the demands of a free electron laser (Dalian Coherent Light Source, DCLS) at extreme ultraviolet (EUV) for high resolution plane holographic varied-line-space grating, a plane holographic varied-line-space grating was fabricated based on optical path difference and aberration principle. By using the improved local optimization algorithm, recording parameters of the varied-line-space grating were calculated. The varied-line-space grating at EUV with a center groove density of 600 gr/mm, a duty cycle of 0.46, a groove depth of 550 nm and an effective score area 30 mm30 mm was fabricated on a silicon substrate by using the holographic method. The groove density of the varied-line-space grating was measured by Littrow diffraction and its theoretical resolution was analyzed by aberration theory. The results show that the groove density in an active area is less than 0.175 gr/mm, namely the resolution is far above 12000 in 50-150 nm EUV region, which meets the demand of the DCLS. It concludes that these theories and research findings provide theoretical and technical supports for improving the quality of plane varied-line-space gratings. , 2015, Chinese Academy of Sciences. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56044
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Jiang, Y.-X.,Bayanheshig,X.-L. Zhao,et al. Plane holographic varied-line-space grating for DCLS in EUV region[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2015,23(8):2117-2124.
APA	Jiang, Y.-X.,Bayanheshig,X.-L. Zhao,&S. Yang and N. Wu.(2015).Plane holographic varied-line-space grating for DCLS in EUV region.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,23(8),2117-2124.
MLA	Jiang, Y.-X.,et al."Plane holographic varied-line-space grating for DCLS in EUV region".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 23.8(2015):2117-2124.

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