Influence of adhesive thickness on surface deformation of mirror supported by three-point mount

	Influence of adhesive thickness on surface deformation of mirror supported by three-point mount
	Jia, S.-Q.; W. Huang and W.-B. Pang
	2015
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
卷号	23 期号:7 页码:2005-2012
摘要	By taking the mirror supported by a three-point mount used in a 45 nm immersed lithographic objective lens for a research object, a support structure model with the three-point mount by adhesive connection was established to determine the influence of adhesive thickness on surface deformation of the mirror supported by the three-point mount. The mirror surface deformation distribution due to gravity was analyzed, and the effect of different adhesive thicknesses on surface deformation was discussed through analytical expressions. Then, a finite element model of block-layer-mirror was established. The deformation of mirror surface was simulated for different adhesive thicknesses. The simulation results show that the Root Mean Square (RMS) values of mirror surface deformation first decrease and then increase with the increasing adhesive thickness, and it reaches a minimum of 1.25 nm when the adhesive thickness is about 280 m. Finally, surface deformation changes of the mirror caused by the three-point support were tested through an experiment while adhesive thicknesses were 200 m, 280 m and 400 m. Experiment results show that surface deformation of the mirror is in agreement with simulation result, which verifies the validity of simulation results. , 2015, Chinese Academy of Sciences. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56043
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Jia, S.-Q.,W. Huang and W.-B. Pang. Influence of adhesive thickness on surface deformation of mirror supported by three-point mount[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2015,23(7):2005-2012.
APA	Jia, S.-Q.,&W. Huang and W.-B. Pang.(2015).Influence of adhesive thickness on surface deformation of mirror supported by three-point mount.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,23(7),2005-2012.
MLA	Jia, S.-Q.,et al."Influence of adhesive thickness on surface deformation of mirror supported by three-point mount".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 23.7(2015):2005-2012.

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胶层厚度对三点支撑反射镜面形的影响.ca（866KB）	期刊论文	作者接受稿	开放获取	CC BY-NC-SA	浏览下载