Error correction of interferometer detection with high-accuracy rotation method

	Error correction of interferometer detection with high-accuracy rotation method
	Han, D.-S.; X. He; Z.-H. Wei and Y.-M. Li
	2015
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
卷号	23 期号:5 页码:1297-1303
摘要	According to the requirements of absolute flatness detection of optical elements for rotation accuracy by using high-accuracy rotation method based on a Fizeau interferometer, a rotary error correction model was proposed to correct the rotationally asymmetric deviation in the detection. Firstly, on the theoretical basis of the classical N-step rotation average method, a mathematical expression of surface deviation was given by Zernike polynomials. Then, the Zernike coefficient was corrected according to the error caused by the rotation angle and the rotationally asymmetric deviation was corrected. Finally, the correctness of the calibration model was verified by numerical simulation method and an actual experimental test. In the conditions in rotation error of 0.1, the simulation shows that the absolute detection error (Root Mean Square, RMS) is 10.13% by using the N-step rotation average method, and it can be promoted to 6.79% after being corrected. Moreover, the experiment shows that the detection error (RMS) is 10.28% by using the same method, and it is promoted to 5.77% after being corrected. These results demonstrate that the proposed calibration model is accurate and reliable, which improves the detection accuracy of the rotational averaging method and reduces the rotationally asymmetric deviation to the proportion of 27.2%. , 2015, Chinese Academy of Sciences. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56039
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Han, D.-S.,X. He,Z.-H. Wei and Y.-M. Li. Error correction of interferometer detection with high-accuracy rotation method[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2015,23(5):1297-1303.
APA	Han, D.-S.,X. He,&Z.-H. Wei and Y.-M. Li.(2015).Error correction of interferometer detection with high-accuracy rotation method.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,23(5),1297-1303.
MLA	Han, D.-S.,et al."Error correction of interferometer detection with high-accuracy rotation method".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 23.5(2015):1297-1303.

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