Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Nanostructure machining by AFM probe combined with continuous laser | |
Cheng, B.; B. Han; L.-S. Gu; X.-P. Chen and L.-J. Yang | |
2015 | |
发表期刊 | Guangxue Jingmi Gongcheng/Optics and Precision Engineering |
卷号 | 23期号:7页码:2043-2050 |
摘要 | To obtain the nanostructure with stable morphology and a smallest possible size, a nanostructure machining system is established by an Atomic Force Microscopic (AFM) probe combined with a continuous laser. With this method, the study focuses on the near-field enhancement theoretical analysis and simulation when the continuous laser irradiates the AFM probe and the machining performance of this system. Firstly, based on the mechanism of surface Plasmon (SP), the Factor of Enhancement Field(FEF), temperature field and the thermal expansion on the probe tip are researched. A nanostructure machining system is set up based on the optical fiber probe to guide the laser to irradiate on the AFM probe. At last, the polyethylene (PE) is chosen as a sample to do the experiment. Experimental results indicate that the size of the processed nanodot is about 200 nm and that of the nanowire is about 30-40 nm. This method shows the proposed probe has simple-structure and inexpensive-cost and could achieve nanostructure machining. , 2015, Chinese Academy of Sciences. All right reserved. |
文章类型 | 期刊论文 |
收录类别 | EI |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/56018 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Cheng, B.,B. Han,L.-S. Gu,et al. Nanostructure machining by AFM probe combined with continuous laser[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2015,23(7):2043-2050. |
APA | Cheng, B.,B. Han,L.-S. Gu,&X.-P. Chen and L.-J. Yang.(2015).Nanostructure machining by AFM probe combined with continuous laser.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,23(7),2043-2050. |
MLA | Cheng, B.,et al."Nanostructure machining by AFM probe combined with continuous laser".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 23.7(2015):2043-2050. |
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纳结构的连续激光复合微纳探针刻划加工.c(550KB) | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | 浏览 下载 |
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