Effect of Au electrode thickness on the performance of MgZnO UV detector

	Effect of Au electrode thickness on the performance of MgZnO UV detector
	Sun, H.-S.; K.-W. Liu; H.-Y. Chen; M.-M. Fan; X. Chen; B.-H. Li and D.-Z. Shen
	2015
发表期刊	Faguang Xuebao/Chinese Journal of Luminescence
卷号	36 期号:2 页码:200-205
摘要	MgZnO films were prepared by RF MBE equipment. X-ray diffraction, UV-visible transmission spectroscopy and X-ray energy dispersive spectroscopy indicated that MgZnO films had a single hexagonal phase structure with a shap absorption edge at ~340 nm, and the composition ratio of Zn and Mg was 62:38. Au electrodes were deposited on MgZnO thin films by an ion sputtering apparatus with a mask and Au-MgZnO-Au UV detectors were fabricated. Au electrodes thicknesses could be modified by changing the sputtering time. With the increasing of Au electrode thickness, the conductivity of Au films increased slowly at first, then increased rapidly, and slowly to saturation finally. As for the transmittance of Au films, it decreased nearly linearly with the increasing of Au electrode thickness. In addition, with the increasing of Au electrodes thickness, the responsivity of MgZnO UV photodetectors gradually increased at first, and then decreased. When the thickness of Au electrode was 28 nm, the device has the best responsivity. , 2015, Chines Academy of Sciences. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/55987
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Sun, H.-S.,K.-W. Liu,H.-Y. Chen,et al. Effect of Au electrode thickness on the performance of MgZnO UV detector[J]. Faguang Xuebao/Chinese Journal of Luminescence,2015,36(2):200-205.
APA	Sun, H.-S.,K.-W. Liu,H.-Y. Chen,M.-M. Fan,X. Chen,&B.-H. Li and D.-Z. Shen.(2015).Effect of Au electrode thickness on the performance of MgZnO UV detector.Faguang Xuebao/Chinese Journal of Luminescence,36(2),200-205.
MLA	Sun, H.-S.,et al."Effect of Au electrode thickness on the performance of MgZnO UV detector".Faguang Xuebao/Chinese Journal of Luminescence 36.2(2015):200-205.

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