Radial-quality uniformity investigations of large-area thick Al films

	Radial-quality uniformity investigations of large-area thick Al films
	Yang, H. G.; Z. Z. Li; X. Y. Wang; Z. F. Shen; J. S. Gao and S. W. Zhang
	2015
发表期刊	Optical Engineering
卷号	54 期号:4 页码:6
摘要	The fabrication of high-quality large-area thick Al films with a thickness around 10 mu m or even more is one of the most important factors to realize high-performance large-size echelle gratings. During the deposition process of large-area Al films, Al film quality generally exhibits a different behavior along the radius (R) direction, which seriously affects the performance of echelle gratings. In this study, for the first time, we investigate the radial-quality uniformity of large-area (R = 400 mm) thick (> 10 mu m) Al films in detail. We not only analyze the radial-quality difference of Al films prepared by the traditional electron-beam evaporation process, but also significantly improve the radial-quality uniformity of large-area thick Al films by using a coevaporation process. By comparing two kinds of film coating processes, we clarify the origin of the radial-quality difference of Al films, and prepare large-area thick Al films with excellent radial-quality uniformity. (C) 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
收录类别	SCI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/55503
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Yang, H. G.,Z. Z. Li,X. Y. Wang,et al. Radial-quality uniformity investigations of large-area thick Al films[J]. Optical Engineering,2015,54(4):6.
APA	Yang, H. G.,Z. Z. Li,X. Y. Wang,Z. F. Shen,&J. S. Gao and S. W. Zhang.(2015).Radial-quality uniformity investigations of large-area thick Al films.Optical Engineering,54(4),6.
MLA	Yang, H. G.,et al."Radial-quality uniformity investigations of large-area thick Al films".Optical Engineering 54.4(2015):6.

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