Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Radial-quality uniformity investigations of large-area thick Al films | |
Yang, H. G.; Z. Z. Li; X. Y. Wang; Z. F. Shen; J. S. Gao and S. W. Zhang | |
2015 | |
发表期刊 | Optical Engineering |
卷号 | 54期号:4页码:6 |
摘要 | The fabrication of high-quality large-area thick Al films with a thickness around 10 mu m or even more is one of the most important factors to realize high-performance large-size echelle gratings. During the deposition process of large-area Al films, Al film quality generally exhibits a different behavior along the radius (R) direction, which seriously affects the performance of echelle gratings. In this study, for the first time, we investigate the radial-quality uniformity of large-area (R = 400 mm) thick (> 10 mu m) Al films in detail. We not only analyze the radial-quality difference of Al films prepared by the traditional electron-beam evaporation process, but also significantly improve the radial-quality uniformity of large-area thick Al films by using a coevaporation process. By comparing two kinds of film coating processes, we clarify the origin of the radial-quality difference of Al films, and prepare large-area thick Al films with excellent radial-quality uniformity. (C) 2015 Society of Photo-Optical Instrumentation Engineers (SPIE) |
收录类别 | SCI |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/55503 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Yang, H. G.,Z. Z. Li,X. Y. Wang,et al. Radial-quality uniformity investigations of large-area thick Al films[J]. Optical Engineering,2015,54(4):6. |
APA | Yang, H. G.,Z. Z. Li,X. Y. Wang,Z. F. Shen,&J. S. Gao and S. W. Zhang.(2015).Radial-quality uniformity investigations of large-area thick Al films.Optical Engineering,54(4),6. |
MLA | Yang, H. G.,et al."Radial-quality uniformity investigations of large-area thick Al films".Optical Engineering 54.4(2015):6. |
条目包含的文件 | 下载所有文件 | |||||
文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
Yang-2015-Radial-qua(2448KB) | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | 浏览 下载 |
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。
修改评论