Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Wave-front reconstruction with Hartmann-Shack sensor using a phase-retrieval method | |
Li J.; Gong Y.; Chen H.; Hu X. | |
2014 | |
发表期刊 | Optics Communications |
ISSN | ISBN/00304018 |
期号 | 336页码:127-133 |
摘要 | We apply a phase retrieval algorithm to the intensity patterns acquired from a Hartmann-Shack wave-front sensor to measure the wave-front aberration of a deep ultraviolet lithography system. The intensity patterns are obtained with and without the micro-lens array. Thus, we avoid selecting algorithm-specific parameters such as step-size and trust-region. Simulation results show that the phase-retrieval method enhances the accuracy of wave-front reconstruction compared with the conventional wave-front slope method. The relationships between the number of iterations of the phase retrieval algorithm, the calculating time and the wave-front reconstruction error are studied. This study demonstrates that the phase-retrieval method provides more accurate estimates of aberrations in near-flat wave-fronts relative to the wave-front slope method. 2014 Elsevier Ltd. All rights reserved. |
收录类别 | SCI ; EI |
语种 | 英语 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/44507 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Li J.,Gong Y.,Chen H.,et al. Wave-front reconstruction with Hartmann-Shack sensor using a phase-retrieval method[J]. Optics Communications,2014(336):127-133. |
APA | Li J.,Gong Y.,Chen H.,&Hu X..(2014).Wave-front reconstruction with Hartmann-Shack sensor using a phase-retrieval method.Optics Communications(336),127-133. |
MLA | Li J.,et al."Wave-front reconstruction with Hartmann-Shack sensor using a phase-retrieval method".Optics Communications .336(2014):127-133. |
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