Selecting system compensators for small scale projected objective using displaced parameters vector

	Selecting system compensators for small scale projected objective using displaced parameters vector
	Zhao Y.; Wang P.; Zhao L.; Liu C.; Hua Y.; Men S.
	2014
发表期刊	Guangxue Xuebao/Acta Optica Sinica
ISSN	ISBN/02532239
卷号	34 期号:8
摘要	Because of the large number of the lenses in a small scale projected objective, it is unsuitable to use a traditional method that each compensator only compensates the corresponding misalignment. A sensitivity matrix is utilized to solve this problem. The sensitivity matrix is decomposed using singularly valuable decomposition method. The values and signs of displaced parameters vector are analyzed, and the correlations among each displaced parameter are obtained. A method of selecting a set of optimum combination of system compensators which only need to analyze a few displaced parameters vectors is proposed. The selected compensators are proved as correct by massive simulation calculations with the aiding of macro commands modes. After the original assembling, a pre-aligning procedure of optical system is carried out to ensure the feasibility of the aligning scheme. Test results show that the wave front errors root mean square (RMS) reduced to 29.6 nm from 70 nm after compensating, which is better than the requirements of the qualifications. The results prove the methods of selecting compensators are right and effective.
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/44360
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhao Y.,Wang P.,Zhao L.,et al. Selecting system compensators for small scale projected objective using displaced parameters vector[J]. Guangxue Xuebao/Acta Optica Sinica,2014,34(8).
APA	Zhao Y.,Wang P.,Zhao L.,Liu C.,Hua Y.,&Men S..(2014).Selecting system compensators for small scale projected objective using displaced parameters vector.Guangxue Xuebao/Acta Optica Sinica,34(8).
MLA	Zhao Y.,et al."Selecting system compensators for small scale projected objective using displaced parameters vector".Guangxue Xuebao/Acta Optica Sinica 34.8(2014).

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