Non-contact rotation angle measurement system for scanning mirrors

	Non-contact rotation angle measurement system for scanning mirrors
	Wang Y.; Yan C.-X.; Hu C.-H.; Wang Y.-Q.; Gu Z.-Y.; Zhang D.; Zhang X.-J.
	2014
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
ISSN	ISBN/1004924X
卷号	22 期号:4 页码:850-855
摘要	A non-contact rotation angle measurement system based on a line laser, and a linear array CCD was established to extent the angle measuring scope of a scanning mirror. The structure and measurement principle of the measurement system were introduced. It calculates the rotational angle of the scanning mirror by the position of the laser spot on the linear CCD and extents the measuring scope by array mirrors with special design. To reduce the alignment requirements, the error was analyzed and a calibration measurement method with polynomial fitting was verified. A series of error sources that affect the measurement accuracy were analyzed and the total errors of the measurement system were calculated. Finally, the related measurement experiment was performed. Experimental results indicate that the measurement system can offer a resolution of 2.5, angular measurement range of 11 , and the precision of angular measurement is up to 3. Obtained results can satisfy the system requirements for non-contact, higher precision and wider measurement ranges.
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/44193
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Wang Y.,Yan C.-X.,Hu C.-H.,et al. Non-contact rotation angle measurement system for scanning mirrors[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2014,22(4):850-855.
APA	Wang Y..,Yan C.-X..,Hu C.-H..,Wang Y.-Q..,Gu Z.-Y..,...&Zhang X.-J..(2014).Non-contact rotation angle measurement system for scanning mirrors.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,22(4),850-855.
MLA	Wang Y.,et al."Non-contact rotation angle measurement system for scanning mirrors".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 22.4(2014):850-855.

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