Hierarchical structure formation and pattern replication by capillary force lithography

	Hierarchical structure formation and pattern replication by capillary force lithography
	Li H.; Yu W.; Xu J.; Yang C.; Wang Y.; Bu H.
	2014
发表期刊	Rsc Advances
ISSN	ISBN/2046-2069
卷号	4 期号:75 页码:39684-39690
摘要	The soft lithographic method is gaining popularity in the manufacturing of low-cost micro and sub-microstructures. For several applications, it is desirable to fabricate structures with different lateral size as well as different height, i.e. hierarchical structures, on the same substrate. This is difficult for normal microfabrication methods, particularly for the photolithography method, which is the main method used in the IC industry. Here we demonstrate a simple yet cost-effective process to form hierarchical structures by capillary force lithography (CFL). In our process, the simple principle that the time needed for the fluid to fill up the cavity in the mould is different if the contact angle of the mould or the width of the cavity in the mould is different. Based on this principle, two methods were developed to achieve hierarchical structures by CFL. One is to selectively modify the PDMS mould by UV or oxygen plasma treatment to change its wettability in different areas. The other is to make patterns with variable dimensions in the mould. By using the PDMS mould with selectively modified wettability or patterns with different lateral dimensions, hierarchical structures with a convex/concave microlens array or stripes with convex/concave surfaces have been manufactured successfully.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/44023
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Li H.,Yu W.,Xu J.,et al. Hierarchical structure formation and pattern replication by capillary force lithography[J]. Rsc Advances,2014,4(75):39684-39690.
APA	Li H.,Yu W.,Xu J.,Yang C.,Wang Y.,&Bu H..(2014).Hierarchical structure formation and pattern replication by capillary force lithography.Rsc Advances,4(75),39684-39690.
MLA	Li H.,et al."Hierarchical structure formation and pattern replication by capillary force lithography".Rsc Advances 4.75(2014):39684-39690.

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