Enhancement of surface photoconductivityin 6H-silicon carbide crystal modified by femtosecond laser pulse irradiation

	Enhancement of surface photoconductivityin 6H-silicon carbide crystal modified by femtosecond laser pulse irradiation
	Gao R. X.; Gao S. Y.; Fan G. H.; Liu J.; Wang Q.; Zhao H. F.; Qu S. L.
	2014
发表期刊	Acta Physica Sinica
ISSN	ISBN/1000-3290
卷号	63 期号:6 页码:6
摘要	The photocurrent is very small when the visible light irradiates the semi-insulating silicon carbide. The femtosecond laser pulses are used to modify the silicon carbide surface, and the result shows that the photocurrent is enlarged several times according to the measurement results of photoconductivity. In order to explain the reasons for this change, some characterization means are employed, including the absorption, emission and X-ray photoelectron spectra. There are found some changes in the absorption spectra and emission spectra, and also in the silicon and carbon atom ratio according to the test results of X-ray photoelectron spectrum. We think that the changes of the crystal structure and atom ratio between silicon and carbon lead to the change of electronic energy band structure and the occurrence of many defect states. As a result, the photocurrents are improved in the range of visible light on the surface of 6H-SiC after the femtosecond laser pulses have irradiated the surface.
收录类别	SCI ; EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/43964
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Gao R. X.,Gao S. Y.,Fan G. H.,et al. Enhancement of surface photoconductivityin 6H-silicon carbide crystal modified by femtosecond laser pulse irradiation[J]. Acta Physica Sinica,2014,63(6):6.
APA	Gao R. X..,Gao S. Y..,Fan G. H..,Liu J..,Wang Q..,...&Qu S. L..(2014).Enhancement of surface photoconductivityin 6H-silicon carbide crystal modified by femtosecond laser pulse irradiation.Acta Physica Sinica,63(6),6.
MLA	Gao R. X.,et al."Enhancement of surface photoconductivityin 6H-silicon carbide crystal modified by femtosecond laser pulse irradiation".Acta Physica Sinica 63.6(2014):6.

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