Effect of measured interference fringe period error on groove profile of grating masks in scanning beam interference lithography system

	Effect of measured interference fringe period error on groove profile of grating masks in scanning beam interference lithography system
	Jiang S.; Bayanheshig; Song Y.; Pan M.; Li W.
	2014
发表期刊	Guangxue Xuebao/Acta Optica Sinica
ISSN	ISBN/02532239
卷号	34 期号:4
摘要	Measured interference fringe period error has a major effect on the phase stitching error in scanning beam interference lithography system. In order to make high quality grating masks which can meet the requirement of the ion beam etching, mathematical model of the relationship between measured fringe period error and dose contrast is established. Based on the photoresist nonlinearities in developing process, the developing model of grating masks made by scanning beam interference lithography system is built. According to this model, variation of groove profile with measured fringe period error is given. Experiments are done to verify this model. It shows that: measured fringe period error makes groove profile worse and varies in space domain. With a certain measured fringe period error, phase stitching error between scans is proportional to step over distance and inversely proportional to fringe period. When interference beam waist radius is 1 mm, step over distance is 0.8 mm and grating line density is 1800 gr/mm, with certain developing conditions, measured fringe period error must be less than 139 ppm to make grating masks with bottom clean without residue and groove uniform.
收录类别	EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/43930
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Jiang S.,Bayanheshig,Song Y.,et al. Effect of measured interference fringe period error on groove profile of grating masks in scanning beam interference lithography system[J]. Guangxue Xuebao/Acta Optica Sinica,2014,34(4).
APA	Jiang S.,Bayanheshig,Song Y.,Pan M.,&Li W..(2014).Effect of measured interference fringe period error on groove profile of grating masks in scanning beam interference lithography system.Guangxue Xuebao/Acta Optica Sinica,34(4).
MLA	Jiang S.,et al."Effect of measured interference fringe period error on groove profile of grating masks in scanning beam interference lithography system".Guangxue Xuebao/Acta Optica Sinica 34.4(2014).

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