Development of spherical wave generating device for lithographic objective wavefront aberration detection

	Development of spherical wave generating device for lithographic objective wavefront aberration detection
	Qi K.; Xiang Y.
	2014
发表期刊	Yi Qi Yi Biao Xue Bao/中文 Journal of Scientific Instrument
ISSN	ISBN/02543087
卷号	35 期号:7 页码:1518-1524
摘要	Based on the principle of shearing interference used for lithographic objective wavefront aberration detection, in order to meet the requirement of the visible-light prototype for spherical wave, a spherical wave generating device with the advantages of long stroke, high-precision and self-locking capability was designed. The spherical wave was generated by the method of pinhole diffraction. A 2-DOF serial flexible mechanism was adopted, which was driven by particular piezo actuators. The deformation of the spherical wave generating device under force exerted condition was simulated with the finite element method. Analysis results confirm that the driving force of the actuators could meet the requirements. The modal characteristics of the structure were also analyzed. Through experimental measurements, the displacement resolution of the spherical wave generating device was obtained, and the linearity of the output displacement is proved to be good.
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/43891
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Qi K.,Xiang Y.. Development of spherical wave generating device for lithographic objective wavefront aberration detection[J]. Yi Qi Yi Biao Xue Bao/中文 Journal of Scientific Instrument,2014,35(7):1518-1524.
APA	Qi K.,&Xiang Y..(2014).Development of spherical wave generating device for lithographic objective wavefront aberration detection.Yi Qi Yi Biao Xue Bao/中文 Journal of Scientific Instrument,35(7),1518-1524.
MLA	Qi K.,et al."Development of spherical wave generating device for lithographic objective wavefront aberration detection".Yi Qi Yi Biao Xue Bao/中文 Journal of Scientific Instrument 35.7(2014):1518-1524.

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