Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Development of spherical wave generating device for lithographic objective wavefront aberration detection | |
Qi K.; Xiang Y. | |
2014 | |
发表期刊 | Yi Qi Yi Biao Xue Bao/中文 Journal of Scientific Instrument |
ISSN | ISBN/02543087 |
卷号 | 35期号:7页码:1518-1524 |
摘要 | Based on the principle of shearing interference used for lithographic objective wavefront aberration detection, in order to meet the requirement of the visible-light prototype for spherical wave, a spherical wave generating device with the advantages of long stroke, high-precision and self-locking capability was designed. The spherical wave was generated by the method of pinhole diffraction. A 2-DOF serial flexible mechanism was adopted, which was driven by particular piezo actuators. The deformation of the spherical wave generating device under force exerted condition was simulated with the finite element method. Analysis results confirm that the driving force of the actuators could meet the requirements. The modal characteristics of the structure were also analyzed. Through experimental measurements, the displacement resolution of the spherical wave generating device was obtained, and the linearity of the output displacement is proved to be good. |
收录类别 | EI |
语种 | 中文 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/43891 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Qi K.,Xiang Y.. Development of spherical wave generating device for lithographic objective wavefront aberration detection[J]. Yi Qi Yi Biao Xue Bao/中文 Journal of Scientific Instrument,2014,35(7):1518-1524. |
APA | Qi K.,&Xiang Y..(2014).Development of spherical wave generating device for lithographic objective wavefront aberration detection.Yi Qi Yi Biao Xue Bao/中文 Journal of Scientific Instrument,35(7),1518-1524. |
MLA | Qi K.,et al."Development of spherical wave generating device for lithographic objective wavefront aberration detection".Yi Qi Yi Biao Xue Bao/中文 Journal of Scientific Instrument 35.7(2014):1518-1524. |
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