Computer-aided alignment for the lithographic lens

	Computer-aided alignment for the lithographic lens
	Zhao F.; Tang J.; Huang W.; Xu W.
	2014
发表期刊	Guangxue Xuebao/Acta Optica Sinica
ISSN	ISBN/02532239
卷号	34 期号:6
摘要	Computer-aided alignment technology is introduced into the alignment of the lithographic lens and mathematical model is established for strict image quality requirements of lithographic lens. The 4th to 37th terms of fringe zernike polynomials and distortion are selected as corrected objects and 19 structural parameters are selected as compensators. The data of sensitivity matrix and image quality are acquired by combing macros of CODE V with Matlab. Singular value decomposition is proposed to calculate the weighted least-squares compensation amount. The Zernike coefficients or distortion of different field is improved by weight factor. The wavefront root mean square difference is about 0.004 and the average distortion difference is about 1 nm between compensated objective and designed objective. The wavefront aberration and distortion are basically recovered to the design level.
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/43802
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhao F.,Tang J.,Huang W.,et al. Computer-aided alignment for the lithographic lens[J]. Guangxue Xuebao/Acta Optica Sinica,2014,34(6).
APA	Zhao F.,Tang J.,Huang W.,&Xu W..(2014).Computer-aided alignment for the lithographic lens.Guangxue Xuebao/Acta Optica Sinica,34(6).
MLA	Zhao F.,et al."Computer-aided alignment for the lithographic lens".Guangxue Xuebao/Acta Optica Sinica 34.6(2014).

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