2D calculation of heating process and crater shape for ultrashort lasers ablation silicon films

	2D calculation of heating process and crater shape for ultrashort lasers ablation silicon films
	Jin F.-Y.; Chen B.; E S.-L.; Wang H.-F.
	2014
发表期刊	Guangzi Xuebao/Acta Photonica Sinica
ISSN	ISBN/10044213
卷号	43 期号:9
摘要	Based on two-temperature model and free-electron gas model, a new calculation method, finite element model is fabricated, which provides a new perspective into studying the energy transport process in silicon film irradiated by ultrashort laser pulses. By choosing suitable thickness of silicon films, the 2D spatial and temporal evolutions of the electron temperature as well as carrier density in silicon film irradiated by IR and visible lasers are obtained. The evolutions of complex refractive index and plasma reflectivity are also calculated, through analysis, results show that they are dominated by carrier density. By depicting the electron heat flux evolutions, the energy transport process is analyzed. The distributions of lattice and carrier density are depicted, results show that the lattice temperature is stayed well down below the melting point, and the critical density of carrier density is the dominated factor of ablation. The calculated threshold influences are validated by comparing study and experimental data. The predicted crater shapes are obtained, which are waiting for experimental validating.
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/43659
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Jin F.-Y.,Chen B.,E S.-L.,et al. 2D calculation of heating process and crater shape for ultrashort lasers ablation silicon films[J]. Guangzi Xuebao/Acta Photonica Sinica,2014,43(9).
APA	Jin F.-Y.,Chen B.,E S.-L.,&Wang H.-F..(2014).2D calculation of heating process and crater shape for ultrashort lasers ablation silicon films.Guangzi Xuebao/Acta Photonica Sinica,43(9).
MLA	Jin F.-Y.,et al."2D calculation of heating process and crater shape for ultrashort lasers ablation silicon films".Guangzi Xuebao/Acta Photonica Sinica 43.9(2014).

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