Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Time behavior and optimum conditions for the Xe gas extreme ultraviolet source | |
Zhao Y. P.; Xu Q.; Xiao D. L.; Ding N.; Xie Y.; Li Q.; Wang Q. | |
2013 | |
发表期刊 | Acta Physica Sinica |
ISSN | ISBN/1000-3290 |
卷号 | 62期号:24 |
摘要 | The time behavior and the optimum conditions for the Xe gas capillary discharge extrem ultraviolet source are investigated theoretically and experimentally. By setting up a one-dimensional magneto-fluid-mechanics model, the plasma compressing characteristics and the emission characteristics are simulated under different gas pressures and different discharge currents. The time characteristic and the intensity of the 13.5 nm (2% bandwidth) emission are measured experimentally. The theoretical and experimental results show that there are the optimum gas pressures for different discharge currents. Meanwhile, the optimum gas pressure increases with the discharge current increasing. Moreover, the time to generate the highest 13.5 nm (2% bandwidth) emission should decrease by the increase of the discharge current. All the results should be useful to better understand the plasma condition for the discharge experiments and the EUV source. And it can be used to increase the power of the extreme ultraviolet source as well. |
收录类别 | SCI |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/40907 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Zhao Y. P.,Xu Q.,Xiao D. L.,et al. Time behavior and optimum conditions for the Xe gas extreme ultraviolet source[J]. Acta Physica Sinica,2013,62(24). |
APA | Zhao Y. P..,Xu Q..,Xiao D. L..,Ding N..,Xie Y..,...&Wang Q..(2013).Time behavior and optimum conditions for the Xe gas extreme ultraviolet source.Acta Physica Sinica,62(24). |
MLA | Zhao Y. P.,et al."Time behavior and optimum conditions for the Xe gas extreme ultraviolet source".Acta Physica Sinica 62.24(2013). |
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文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
Xe介质极紫外光源时间特性及最佳条件研究(494KB) | 开放获取 | CC BY-NC-ND | 浏览 下载 |
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