Time behavior and optimum conditions for the Xe gas extreme ultraviolet source

	Time behavior and optimum conditions for the Xe gas extreme ultraviolet source
	Zhao Y. P.; Xu Q.; Xiao D. L.; Ding N.; Xie Y.; Li Q.; Wang Q.
	2013
发表期刊	Acta Physica Sinica
ISSN	ISBN/1000-3290
卷号	62 期号:24
摘要	The time behavior and the optimum conditions for the Xe gas capillary discharge extrem ultraviolet source are investigated theoretically and experimentally. By setting up a one-dimensional magneto-fluid-mechanics model, the plasma compressing characteristics and the emission characteristics are simulated under different gas pressures and different discharge currents. The time characteristic and the intensity of the 13.5 nm (2% bandwidth) emission are measured experimentally. The theoretical and experimental results show that there are the optimum gas pressures for different discharge currents. Meanwhile, the optimum gas pressure increases with the discharge current increasing. Moreover, the time to generate the highest 13.5 nm (2% bandwidth) emission should decrease by the increase of the discharge current. All the results should be useful to better understand the plasma condition for the discharge experiments and the EUV source. And it can be used to increase the power of the extreme ultraviolet source as well.
收录类别	SCI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/40907
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhao Y. P.,Xu Q.,Xiao D. L.,et al. Time behavior and optimum conditions for the Xe gas extreme ultraviolet source[J]. Acta Physica Sinica,2013,62(24).
APA	Zhao Y. P..,Xu Q..,Xiao D. L..,Ding N..,Xie Y..,...&Wang Q..(2013).Time behavior and optimum conditions for the Xe gas extreme ultraviolet source.Acta Physica Sinica,62(24).
MLA	Zhao Y. P.,et al."Time behavior and optimum conditions for the Xe gas extreme ultraviolet source".Acta Physica Sinica 62.24(2013).

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