Design and fabrication of step mirrors used in space-modulated Fourier transform infrared spectrometer

	Design and fabrication of step mirrors used in space-modulated Fourier transform infrared spectrometer
	Zheng Y.; Liang J.; Liang Z.
	2013
发表期刊	Optics Express
ISSN	ISBN/10944087
卷号	21 期号:1
摘要	A model of miniaturized space-modulated Fourier transform infrared spectrometer (FTIR) is given. The two step mirrors as the key components are designed and a lithography-electroplating technique used to fabricate the small step mirror is proposed. We analyze the effect of the experiment results resulted from fabricating technics on the recovery spectrum in theory, and demonstrate that the lithography-electroplating technique is an effective method to fabricate the step mirror, which make miniaturized FTIR realized. We believe that the performances of FTIR can be better realized by optimizing experimental conditions to make this fabricating method more attractive. 2013 Optical Society of America.
收录类别	SCI ; EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/40597
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zheng Y.,Liang J.,Liang Z.. Design and fabrication of step mirrors used in space-modulated Fourier transform infrared spectrometer[J]. Optics Express,2013,21(1).
APA	Zheng Y.,Liang J.,&Liang Z..(2013).Design and fabrication of step mirrors used in space-modulated Fourier transform infrared spectrometer.Optics Express,21(1).
MLA	Zheng Y.,et al."Design and fabrication of step mirrors used in space-modulated Fourier transform infrared spectrometer".Optics Express 21.1(2013).

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