Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Method to improve the effect of surface modification of RB-SiC mirror by SiC coating | |
Shen Z. | |
2012 | |
发表期刊 | Chinese Optics Letters |
ISSN | 16717694 |
卷号 | 10期号:SUPPL.1 |
摘要 | SiC coating for surface modification grows on reaction boned SiC (RB-SiC) substrate cannot have high quality because the material of RB-SiC has two phases. We apply a new method to improve the effect of surface modification. First the surface of RB-SiC is carbonized, and then a diamond like carbon (DLC) coating is prepared on it before the growth of SiC coating. Research and tests show that the SiC coating can grow denser and uniform because of the buffer function of the DLC coating, thus the effect of surface modification is improved. The roughness reduces from 1.397 to 0.478 nm (rms) after the surface modification using DLC buffer layer. 2012 Chinese Optics Letter. |
收录类别 | EI |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/34591 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Shen Z.. Method to improve the effect of surface modification of RB-SiC mirror by SiC coating[J]. Chinese Optics Letters,2012,10(SUPPL.1). |
APA | Shen Z..(2012).Method to improve the effect of surface modification of RB-SiC mirror by SiC coating.Chinese Optics Letters,10(SUPPL.1). |
MLA | Shen Z.."Method to improve the effect of surface modification of RB-SiC mirror by SiC coating".Chinese Optics Letters 10.SUPPL.1(2012). |
条目包含的文件 | 下载所有文件 | |||||
文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
bj01280140.pdf(75KB) | 开放获取 | -- | 浏览 下载 |
个性服务 |
推荐该条目 |
保存到收藏夹 |
查看访问统计 |
导出为Endnote文件 |
谷歌学术 |
谷歌学术中相似的文章 |
[Shen Z.]的文章 |
百度学术 |
百度学术中相似的文章 |
[Shen Z.]的文章 |
必应学术 |
必应学术中相似的文章 |
[Shen Z.]的文章 |
相关权益政策 |
暂无数据 |
收藏/分享 |
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。
修改评论