Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Transmission ratio analysis for a lateral adjustment barrel in DUV projection lens | |
Ni M.; Gong Y. | |
2012 | |
发表期刊 | Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering |
ISSN | 10072276 |
卷号 | 41期号:12页码:3323-3330 |
摘要 | Low order coma and astigmatism of lithographic projection lens is mainly compensated by lateral adjustment for critical optical elements. Analysis of the structural principles and characteristics of transmission ratio for a lateral adjustment barrel applied in DUV lithographic projection lens was presented. Firstly, the transmission ratio formulas were derived based on theory of instantaneous center of zero velocity; then the input/output transmission ratios for the displacements along both X and Y directions were analyzed based on the kinematic simulation model of the lateral adjustment barrel; finally, the displacement linearity and orthogonal parasitic error along both X and Y directions were analyzed. The results indicate that: the relative errors of transmission ratios between the theoretical formulas and kinematic analysis are extremely small; the output displacements along X and Y directions show strong linearity with respect to the input of actuator; the parasitic errors in X and Y directions for 100 m input displacement are less than 0.16% and 0.497%, respectively, and the parasitic errors rise to 3.486% and 9.888%, respectively for 2000 m input. |
收录类别 | EI |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/34586 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Ni M.,Gong Y.. Transmission ratio analysis for a lateral adjustment barrel in DUV projection lens[J]. Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,2012,41(12):3323-3330. |
APA | Ni M.,&Gong Y..(2012).Transmission ratio analysis for a lateral adjustment barrel in DUV projection lens.Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,41(12),3323-3330. |
MLA | Ni M.,et al."Transmission ratio analysis for a lateral adjustment barrel in DUV projection lens".Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering 41.12(2012):3323-3330. |
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