Transmission ratio analysis for a lateral adjustment barrel in DUV projection lens

	Transmission ratio analysis for a lateral adjustment barrel in DUV projection lens
	Ni M.; Gong Y.
	2012
发表期刊	Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering
ISSN	10072276
卷号	41 期号:12 页码:3323-3330
摘要	Low order coma and astigmatism of lithographic projection lens is mainly compensated by lateral adjustment for critical optical elements. Analysis of the structural principles and characteristics of transmission ratio for a lateral adjustment barrel applied in DUV lithographic projection lens was presented. Firstly, the transmission ratio formulas were derived based on theory of instantaneous center of zero velocity; then the input/output transmission ratios for the displacements along both X and Y directions were analyzed based on the kinematic simulation model of the lateral adjustment barrel; finally, the displacement linearity and orthogonal parasitic error along both X and Y directions were analyzed. The results indicate that: the relative errors of transmission ratios between the theoretical formulas and kinematic analysis are extremely small; the output displacements along X and Y directions show strong linearity with respect to the input of actuator; the parasitic errors in X and Y directions for 100 m input displacement are less than 0.16% and 0.497%, respectively, and the parasitic errors rise to 3.486% and 9.888%, respectively for 2000 m input.
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/34586
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Ni M.,Gong Y.. Transmission ratio analysis for a lateral adjustment barrel in DUV projection lens[J]. Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,2012,41(12):3323-3330.
APA	Ni M.,&Gong Y..(2012).Transmission ratio analysis for a lateral adjustment barrel in DUV projection lens.Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,41(12),3323-3330.
MLA	Ni M.,et al."Transmission ratio analysis for a lateral adjustment barrel in DUV projection lens".Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering 41.12(2012):3323-3330.

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