Super-smooth surface fabrication technique and experimental research

	Super-smooth surface fabrication technique and experimental research
	Zhang L. H.; Wang J. L.; Zhang J.
	2012
发表期刊	Applied Optics
ISSN	1559-128X
卷号	51 期号:27 页码:6612-6617
摘要	Wheel polishing, a new optical fabrication technique, is proposed for super-smooth surface fabrication of optical components in high-precision optical instruments. The machining mechanism and the removal function contours are investigated in detail. The elastohydrodynamic lubrication theory is adopted to analyze the deformation of the wheel head, the pressure distribution, and the fluid film thickness distribution in the narrow machining zone. The pressure and the shear stress distributions at the interface between the slurry and the sample are numerically simulated. Practical polishing experiments are arranged to analyze the relationship between the wheel-sample distance and the machining rate. It is demonstrated in this paper that the wheel-sample distance will directly influence the removal function contours. Moreover, ripples on the wheel surface will eventually induce the transverse prints on the removal function contours. The surface roughness of fused silicon is reduced to less than 0.5 nm (rms) from initial 1.267 nm (rms). The wheel polishing technique is feasible for super-smooth surface fabrication. (C) 2012 Optical Society of America
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/34540
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhang L. H.,Wang J. L.,Zhang J.. Super-smooth surface fabrication technique and experimental research[J]. Applied Optics,2012,51(27):6612-6617.
APA	Zhang L. H.,Wang J. L.,&Zhang J..(2012).Super-smooth surface fabrication technique and experimental research.Applied Optics,51(27),6612-6617.
MLA	Zhang L. H.,et al."Super-smooth surface fabrication technique and experimental research".Applied Optics 51.27(2012):6612-6617.

条目包含的文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
bj01277147.pdf（589KB）			开放获取	--	浏览请求全文