Absolute surface figure testing by shift-rotation method using Zernike polynomials

	Absolute surface figure testing by shift-rotation method using Zernike polynomials
	Su D. Q.; Miao E. L.; Sui Y. X.; Yang H. J.
	2012
发表期刊	Optics Letters
ISSN	0146-9592
卷号	37 期号:15 页码:3198-3200
摘要	In surface figure testing, most of them are relative tests, and the reference surface usually limits the accuracy of test results. Absolute calibration is one of the most important and efficient techniques to reach subnanometer accuracy in surface figure testing. An absolute testing method, a shift-rotation method using Zernike polynomials, is presented, which can be used to calibrate both flat and spherical surfaces (concave or convex). Calibration contains at least three position measurements: one basic position, one rotation, and one lateral shift of the test surface. Experiments show that the repeatability of this method is 0.13 nm RMS, and pixel-to-pixel comparison with the two-sphere method is 0.2 nm RMS. (C) 2012 Optical Society of America
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/34329
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Su D. Q.,Miao E. L.,Sui Y. X.,et al. Absolute surface figure testing by shift-rotation method using Zernike polynomials[J]. Optics Letters,2012,37(15):3198-3200.
APA	Su D. Q.,Miao E. L.,Sui Y. X.,&Yang H. J..(2012).Absolute surface figure testing by shift-rotation method using Zernike polynomials.Optics Letters,37(15),3198-3200.
MLA	Su D. Q.,et al."Absolute surface figure testing by shift-rotation method using Zernike polynomials".Optics Letters 37.15(2012):3198-3200.