Characteristics of selective oxidation during the fabrication of vertical cavity surface emitting laser

	Characteristics of selective oxidation during the fabrication of vertical cavity surface emitting laser
其他题名	论文其他题名
	Hao Y. Q.; Zhong J. C.; Ma J. L.; Zhang Y. M.; Wang L. J.
	2006
发表期刊	Chinese Physics
ISSN	1009-1963
卷号	15 期号:8 页码:1806-1809
摘要	Taking into account oxidation temperature, N-2 carrier gas flow, and the geometry of the mesa structures this paper investigates the characteristics of selective oxidation during the fabrication of the vertical cavity surface emitting laser ( VCSEL) in detail. Results show that the selective oxidation follows a law which differs from any reported in the literature. Below 435 degrees C selective oxidation of Al0.98Ga0.02As follows a linear growth law for the two mesa structures employed in VCSEL. Above 435 degrees C approximately increasing parabolic growth is found, which is influenced by the geometry of the mesa structures. Theoretical analysis on the difference between the two structures for the initial oxidation has been performed, which demonstrates that the geometry of the mesa structures does influence on the growth rate of oxide at higher temperatures.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26699
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Hao Y. Q.,Zhong J. C.,Ma J. L.,et al. Characteristics of selective oxidation during the fabrication of vertical cavity surface emitting laser[J]. Chinese Physics,2006,15(8):1806-1809.
APA	Hao Y. Q.,Zhong J. C.,Ma J. L.,Zhang Y. M.,&Wang L. J..(2006).Characteristics of selective oxidation during the fabrication of vertical cavity surface emitting laser.Chinese Physics,15(8),1806-1809.
MLA	Hao Y. Q.,et al."Characteristics of selective oxidation during the fabrication of vertical cavity surface emitting laser".Chinese Physics 15.8(2006):1806-1809.

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