Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Characteristics of selective oxidation during the fabrication of vertical cavity surface emitting laser | |
其他题名 | 论文其他题名 |
Hao Y. Q.; Zhong J. C.; Ma J. L.; Zhang Y. M.; Wang L. J. | |
2006 | |
发表期刊 | Chinese Physics |
ISSN | 1009-1963 |
卷号 | 15期号:8页码:1806-1809 |
摘要 | Taking into account oxidation temperature, N-2 carrier gas flow, and the geometry of the mesa structures this paper investigates the characteristics of selective oxidation during the fabrication of the vertical cavity surface emitting laser ( VCSEL) in detail. Results show that the selective oxidation follows a law which differs from any reported in the literature. Below 435 degrees C selective oxidation of Al0.98Ga0.02As follows a linear growth law for the two mesa structures employed in VCSEL. Above 435 degrees C approximately increasing parabolic growth is found, which is influenced by the geometry of the mesa structures. Theoretical analysis on the difference between the two structures for the initial oxidation has been performed, which demonstrates that the geometry of the mesa structures does influence on the growth rate of oxide at higher temperatures. |
收录类别 | SCI ; EI |
语种 | 英语 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/26699 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Hao Y. Q.,Zhong J. C.,Ma J. L.,et al. Characteristics of selective oxidation during the fabrication of vertical cavity surface emitting laser[J]. Chinese Physics,2006,15(8):1806-1809. |
APA | Hao Y. Q.,Zhong J. C.,Ma J. L.,Zhang Y. M.,&Wang L. J..(2006).Characteristics of selective oxidation during the fabrication of vertical cavity surface emitting laser.Chinese Physics,15(8),1806-1809. |
MLA | Hao Y. Q.,et al."Characteristics of selective oxidation during the fabrication of vertical cavity surface emitting laser".Chinese Physics 15.8(2006):1806-1809. |
条目包含的文件 | 下载所有文件 | |||||
文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
Hao-2006-Characteris(158KB) | 开放获取 | -- | 浏览 下载 |
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。
修改评论