Analysis of the dynamic behaviour of a torsional micro-mirror

	Analysis of the dynamic behaviour of a torsional micro-mirror
其他题名	论文其他题名
	Sun D. M.; Dong W.; Liu C. X.; Chen W. Y.; Kraft M.
	2007
发表期刊	Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems
ISSN	0946-7076
卷号	13 期号:1 页码:61-70
摘要	In this paper, the results of the dynamic pull-in voltage characteristics of a micro-mirror using electrostatic actuation are analyzed. Based on torsional dynamic theory, appropriate equations are developed that allowed to give insight into the actuating voltage, switching time and other dynamic parameters. The analytical results are discussed in detail without and with considering air squeeze film damping, respectively. This is equivalent to assuming the mirror is operated in vacuum or at ambient pressure. When the effect of the damping is considered, the movement trajectory of the cantilever beam is changed, and the calculated results of the pull-in voltage and switching time are considerably different compared to those without considering damping. Therefore, the effect of the air squeeze film damping is an important factor in the design and fabrication of micro-electro-mechanical systems. Finally, the experimental results in the air environment are discussed and compared to the theoretical analysis.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26607
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Sun D. M.,Dong W.,Liu C. X.,et al. Analysis of the dynamic behaviour of a torsional micro-mirror[J]. Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems,2007,13(1):61-70.
APA	Sun D. M.,Dong W.,Liu C. X.,Chen W. Y.,&Kraft M..(2007).Analysis of the dynamic behaviour of a torsional micro-mirror.Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems,13(1),61-70.
MLA	Sun D. M.,et al."Analysis of the dynamic behaviour of a torsional micro-mirror".Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems 13.1(2007):61-70.

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