The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition

	The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition
其他题名	论文其他题名
	Meng L. J.; Gao J.; Dos Santos M. P.; Wang X.; Wang T.
	2008
发表期刊	Thin Solid Films
ISSN	0040-6090
卷号	516 期号:7 页码:1365-1369
摘要	Indium tin oxide (ITO) thin films have been deposited onto polycarbonate substrates by ion beam assisted deposition technique at room temperature. The structural, optical and electrical properties of the films have been characterized by X-ray diffraction, atomic force microscopy, optical transmittance, ellipsometric and Hall effect measurements. The effect of the ion beam energy on the properties of the films has been studied. The optical parameters have been obtained by fitting the ellipsometric spectra. It has been found that high quality ITO film (low electrical resistivity and high optical transmittance) can be obtained at low ion beam energy. In addition, the ITO film prepared at low ion beam energy gives a high reflectance in IR region that is useful for some electromagnetic wave shielding applications. (c) 2007 Elsevier B.V. All rights reserved.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26446
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Meng L. J.,Gao J.,Dos Santos M. P.,et al. The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition[J]. Thin Solid Films,2008,516(7):1365-1369.
APA	Meng L. J.,Gao J.,Dos Santos M. P.,Wang X.,&Wang T..(2008).The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition.Thin Solid Films,516(7),1365-1369.
MLA	Meng L. J.,et al."The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition".Thin Solid Films 516.7(2008):1365-1369.

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