Effect of the oxygen flow on the properties of ITO thin films deposited by ion beam assisted deposition (IBAD)

	Effect of the oxygen flow on the properties of ITO thin films deposited by ion beam assisted deposition (IBAD)
其他题名	论文其他题名
	Meng L. J.; Gao J. S.; Silva R. A.; Song S. G.
	2008
发表期刊	Thin Solid Films
ISSN	0040-6090
卷号	516 期号:16 页码:5454-5459
摘要	ITO films were deposited onto glass substrates by ion beam assisted deposition method. The oxygen ions were produced using a Kaufman ion source. The oxygen flow was varied from 20 until 60 sccm and the effect of the oxygen flow on properties of ITO films has been studied. The structural properties of the film were characterized by X-ray diffraction and atomic force microscopy. The optical properties were characterized by optical transmission measurements and the optical constants (refractive index n and extinction coefficient k) and film thickness have been obtained by fitting the transmittance using a semi-quantum model. The electrical properties were characterized by Hall effect measurements. It has been found that the ITO film with low electrical resistivity and high transmittance can be obtained with 40 sccm oxygen flow (the working pressure is about 2.3 x 10(-2) Pa at this oxygen flow). (c) 2007 Elsevier B.V. All rights reserved.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26443
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Meng L. J.,Gao J. S.,Silva R. A.,et al. Effect of the oxygen flow on the properties of ITO thin films deposited by ion beam assisted deposition (IBAD)[J]. Thin Solid Films,2008,516(16):5454-5459.
APA	Meng L. J.,Gao J. S.,Silva R. A.,&Song S. G..(2008).Effect of the oxygen flow on the properties of ITO thin films deposited by ion beam assisted deposition (IBAD).Thin Solid Films,516(16),5454-5459.
MLA	Meng L. J.,et al."Effect of the oxygen flow on the properties of ITO thin films deposited by ion beam assisted deposition (IBAD)".Thin Solid Films 516.16(2008):5454-5459.

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